The experimental condition of DC magnetron sputtering for ZMO films with good optical and electric properties has been established.

获得了直流磁控溅射法制备具有良好光电特性的ZMO薄膜的最佳工艺条件；

The effects of substrate temperature and post deposition vacuum annealing on structural, electrical and optical properties of ZMO: ga thin films were investigated.

采用各种分析手段研究了沉积温度和真空退火处理对薄膜结构、表面形貌及光电性能的影响。