A capacitive micro-acoustic sensor with a polysilicon film as diaphragm was designed in this paper.

设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器。

A capacitive micro - acoustic sensor with a polysilicon film as diaphragm was designed in this paper.

设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器.

The principle of fiber phase modulation is described clearly. The basic principium of fiber-optic acoustic sensor is vividly depicted based on the Michelson-type interferometer.

阐述光纤相位调制机理，结合迈克尔逊型干涉结构探讨光纤声传感的基本思想和原理。

The problem of energy consumption is the focus research of underwater acoustic sensor networks, clustering network structure play an important role on the balance of networks energy consumption.

因此能耗问题是传感器网络研究的重点，而分簇网络结构对于均衡网络的能量消耗具有重要作用。